Gas Flow Controller
Originally published in 1980
Body
The Mass Flowmeter is a device used to measure flow of oxygen in spacecraft's life support system. Tylan Corporation's Mass Flow Controller's major application is accurate control of reactive gases--such as hydrogen, phosphine and silane as they are diffused at extremely high temperatures into silicon wafers. Wafers are ultimately cut up into integrated circuits or chips" for electronic products. Precise process control afforded by the Mass Flow Controller makes it possible to produce circuit chips of greater performance at lower cost. "
Full article: http://hdl.handle.net/hdl:2060/20030004773
Abstract
The Mass Flowmeter is a device used to measure flow of oxygen in spacecraft's life support system. Tylan Corporation's Mass Flow Controller's major application is accurate control of reactive gases--such as hydrogen, phosphine and silane as they are diffused at extremely high temperatures into silicon wafers. Wafers are ultimately cut up into integrated circuits or chips" for electronic products. Precise process control afforded by the Mass Flow Controller makes it possible to produce circuit chips of greater performance at lower cost. "
Gas Flow Controller
Gas Flow Controller
